A method and program for capacitance extraction enabling reduction of the need for division into segments during extraction of capacitances in an LSI device having diagonal wires, so that increases in the number of processes for capacitance extraction can be suppressed are provided. Due to the high flexibility of the substrate, the flexibility of the flexible EL device according to the present invention is higher than the conventional EL device using PET, and therefore, the durability of the flexible EL device under mechanical impact is improved. A connecting passage connects a bottom portion of the motor accommodating chamber with the suction chamber.