A sealing terminal for an installations duct of tubular shape is provided. A photodiode is disposed in a portion of the first active region. A bearing for a sliding part is not required, and the resistance loss can be thereby eliminated. The overhead guiding system includes a Y drive system for moving the spindle along a Y axis in relation to the base table, and an X drive system for driving the spindle along an X axis. A hydrophobic layer is applied to a portion of the outer surface of the nozzle and extends into the nozzle bore a determined distance.