1461159864-13700a26-753c-4827-ac2b-e6c293e2f6b4

The acrylate of the present invention is represented by the following formula. A positioning tool provided with a driving section and a positioning section is mounted on a position sensor. A second trench structure extends through the epitaxial layer to the buried layer and includes sidewall insulation and conductive material in electrical contact with the buried layer at a bottom of the second trench structure. Diagnostic, screening and therapeutic methods utilizing compositions of the invention are also provided. Assemblies and methods are shown where the heat spreader is not adhered to a substrate beneath the semiconductor die.