Methods, apparatus, and systems for computing and analyzing integrated circuit yield and quality are disclosed herein. The worm gear is provided so as to be movable in an axial direction thereof. The interconnection structures may be a metal interconnection structure in a variety of integrated circuits. The collection of data, calculations and other functions performed in these techniques may be performed by a system controller, such as a DSL optimizer. The decoding module receives encoding data and detects information data according to the checking data to correct the information data and then produces 3D matrix receiving data.