Expression profiling using DNA microarrays is an important new method for analyzing cellular physiology. The drive body is fixed on a substrate by a first torsion spring torsion-deformed about the X-axis, and the medium body is connected to the drive body by a first bending spring bending-deformed about the Z-axis. The semiconductor device further includes a body region disposed in a portion of the semiconductor substrate between the first ridge and the second ridge, and a gate electrode adjacent to the body region. Methods of making such a composition are also described. The OFDM transmitter includes a guard interval length decider configured to decide a guard interval length in accordance with a feedback signal from an OFDM receiver; and a guard interval length changer configured to change a guard interval length in each transmission symbol period, in accordance with a decided guard interval length without changing a frame length.