A method of reducing foreign material contamination of a substrate in an ion beam system and an ion beam system. Wastewater, received by a sump, is transmitted to a holding tank and treated, over a period of time while-influent wastewater continues off loading. Then, a manifest of all items to synchronize with the mobile computing device may be created based upon information in the synchronization system table. In one embodiment, the method further comprises deploying the electronic document into the workflow based on the workflow configuration data. The protein skimmers include a washing mechanism for periodically washing their foam collection ducts without having to remove their foam collection cups. The plurality of communication modes includes a first communication mode, in which a terminal station in a wireless network carries out communications via a control station, and a second communication mode, in which a plurality of terminal stations carry out communications with each other directly without an intervening control station.