The present invention relates to novel fused heterocyclic or carbocyclic compounds of formula Iwherein the variables are as defined in the claims and the description. Therefore, efficiency in processing the object can be increased, and cracks that occur in the object during laser processing using a polygon mirror can be minimized. The received signal is provided to a multi-path searcher that passes the received signal through a matched filter with a specified number of taps. The endoscopy function module is configured to capture the image outside the expandable capsule endoscope. A premetal dielectric layer is formed over the substrate, and polished to expose the first silicide layer.