A system is provided for use in semiconductor wafer cleaning operations. The OFDM signal, which inherently has a high spectral efficiency, is used for carrying broadband data or control information. The voltage converting unit produces a driving voltage to drive the LED module according to a switching signal. The method further includes depositing, as the pressure differential is maintained, at least one material onto a surface of the perforated shape memory polymer mandrel. The protrusion protrudes toward an outside of the package.