This invention intends to improve the catalyst efficiency by sufficiently providing a triple phase boundary where reaction gas, catalysts, and electrolytes meet in carbon nanohorns. As a function of the selected level of the partial solution annealing temperature, the proportion of the undissolved \u03b3\u2032 phase can be adjusted in a controlled way, and the tolerance with respect to the disorientation of small-angle grain boundariesgrain boundaries can be increased. When an engine is started, an ECU controlling the starter energizes the motor by driving the relay to the resistor side only for a first predetermined time in order to suppress inrush current and voltage fall due to the inrush current. A plasma impermeable spacer is formed on at least one first sidewall of the hard mask portion, while at least one second sidewall of the hard mask portion is physically exposed.