Improved fin field effect transistor devices and methods for the fabrication thereof are provided. The number of separate grating structures thereby can be reduced to two or even one, compared to three in the prior art. The transliteration engine selects candidate transliteration rules, applies the rules, and scores and ranks the results for output. The annealing laser beam scans sufficiently fast so that the dwell time is in the range from about 1 \u03bcs to about 100 \u03bcs. 8 \u03bcm or less, are provided:Copolymer : a copolymer containing a structural unit derived from at least one \u03b1-olefin selected from the group consisting of ethylene and propylene and a structural unit derived from at least one acrylate selected from the group consisting of acrylates having 4 to 12 carbon atoms and methacrylates having 5 to 12 carbon atoms.