A user interface messaging system and method that determines whether the substance of a message relates to information contained in more than one pane, provides the user with an option to merge the panes containing the information related to the substance of the message, and merges the panes into one pane. When a metal film is formed by plasma CVD in a contact hole which penetrates an interlayer insulating film and reaches an electrode of the device, a gas comprising hydrogen and argon in a deposition chamber of a plasma CVD apparatus is introduced. The elongate beam is disposed within the open center portion of the support structure. When the logic panel is configured to actuate the pump to the flushing mode, the pump is configured to exert a negative pressure at the inlet and a positive pressure at the outlet.