A vehicle control apparatus performs regenerative braking by regeneratively operating first and second motor-generators to apply first and second braking torques in response to a deceleration request. 1 to 5 \u03bcm; a sintered body using the composition; and a capacitor constituted by the sintered body as one part electrode, and another part electrode. The tubular lens refracts the diverging beams of light from the two light emitters into separate collimated beams within the aperture. The method further includes performing a first ion implantation, during which, outside the first opening the hardmask is essentially preventing ions from reaching the substrate.