In a sputtering apparatus for depositing material onto a workpiece, an RF coil is disposed in a chamber between a first target and a workpiece support. Such conjugates are useful for the separation, isolation, purification, characterisation, identification or quantification of an endotoxin. Thus, it is possible to provide the image reading device which can suppress variation of a photodetecting TFT property which is observed in a short time. A pad interlayer insulating layer and a bit line interlayer insulating layer having approximately the same etching selectivity ratio as the gate capping layer pattern are sequentially formed over a surface of the semiconductor substrate having the gate spacers. The securing bushing has two transverse slots aligned with the two lateral slots, and the two legs of the securing bracket engage the two transverse slots of the securing bushing. The non-hardened resins are hardened and the rib mold is biochemically degraded wherein in the hardening of the resins, the resin hardened on the rib mold and the resin hardened on the mold surface of the structure mold are united with each other.