A spectrometer arrangement is disclosed for the determination of a radiation wavelength of radiation emitted from a radiation source to be measured. In one embodiment, the method includes creating a bonding pad over a semiconductor substrate, and placing a mask layer over the substrate and the bonding pad. A control operation of the aberration corrector and a control operation of the feeder are conducted in parallel. This allows for a comprehensive design as well as a common look and feel for the web site.