The fluid distribution device includes a first cavity at a first pressure and a second cavity at a second pressure lower than the first pressure. A binder material is applied to the second layer which substantially covers its textured surface and is effective to resist deformation under the application of pressure even in the presence of liquid. The data migration is repeated until the data access counts are equalized among the groups. In a sealing station, the two longitudinal edges of the foil are sealed together and the foil is then sealed onto the closing profile sections. The rotation force of the drive shaft is transmitted to the carrier through an Oldham’s coupling mechanism; thereby, a wafer polishing apparatus can always rotate the carrier in a stable condition even though a wafer receives a friction force in side directions from a polishing pad because no twisting force is applied to the drive shaft. As a result, the beam will be directed to different locations across the objective lens by the scanning mirror, and will travel from the objective lens substantially collimated and parallel toward a surface illuminated by the beam.