A resin sealing sheet is cut into an adhesive sheet piece having an outer shape smaller than that of a wafer. The slave manipulator includes joints having multiple degrees of freedom. A process flow check function 74 provides checks on whether the reviewable process flows comply with the cassette usage rules, and supplies only the conforming process flows to a production line. The optical characteristic of a partition material for separating neighboring scintillator cells, which faces at least one same side face is different between a scintillator cell Ck1,m,n included in one scintillator array layer and a scintillator cell Ck2,m,n included in the other scintillator array layer. , in connection with, or as part of, on-board diagnostic system.