Embodiments disclosed herein enable scaling up and making advanced natural language applications more robust. The contact holes are formed through an interlayer insulating film and arranged in vertical direction to the wiring line. A grooved bushing is disposed below the standardized reception opening. A filter tank communicating with said conveyor is located above the channel. Data from these detected kinds of light may be analyzed to discriminate particles from one another. A voltage source layer and a ground layer of the printed circuit board are divided into an analog area and a digital area respectively via an isolation line, and adapted to conduct voltage source signal and ground signal respectively.