According to example embodiments of the present invention, there are provided an electrical node of a transistor and a method of forming the same, which may reduce or minimize current leakage between the electrical node and a semiconductor substrate when a buried contact hole exposing at least the side of an active region is arranged on the semiconductor substrate. The frame allows a user to easily, simply and quickly pitch or close the tent, in addition to simplifying its construction. The substrate includes multiple first through holes disposed correspondingly to the cavity. The work fluid is evaporated by heat in the first chamber, and owing to the pressure drop the vapor of the work fluid moves to the second chamber through the first pipe. The light detection section receives the interference light and calculates predetermined information regarding the object by making use of the quantity distribution of the interference light.