A method, system and computer program product for reversing effects of reparameterization is disclosed. Since a carbon nanotube is used as an electron emission source, a lithography process can be performed with a precise critical dimension that prevents a deviation from occurring between the center of a substrate and the edge thereof and may realize a high throughput. The Internet address for the Web page is stored on the computer-readable medium. A controller controls the relative movement between fluid wells and the fluid dispensing devices.