A system and method for replicating a distributed computer system state among a plurality of deterministic event processing engines are disclosed. A substrate includes a trench filled by an isolation layer. An example of the process to produce a fluorided metallocene is: wherein N is nitrogen, R and R\u03b1 are groups selected from hydrogen, hydrocarbons, heteroatom-containing hydrocarbons and halides, p can be 0 or an integer from 1 to 5; adjacent R groups can form another ring system ; and the other groups are defined as herein; wherein \u201cEq.