A SAW sensor disposed in on a material. Embodiments include forming a protective layer of amorphous carbon containing metal carbides decreasing in concentration from the metal gate electrode toward the gate oxide layer across the protective layer. At least one of the jaw members includes a second guiding feature operably coupled to the first guiding feature of the body. The references to the content files are replaced with content from the content files. The present invention performs high precision processing with correction performed at short intervals using reference mark confirmation when fine processing requiring accuracy is performed, while positional correction is carried out at long intervals when accuracy is not required, which means there is no wasted time because inefficient correction processing is omitted. The organic electroluminescent device comprises an electron transport layer containing a specific arylamine-substituted coumarin compound.