1460008711-0c0ff9fa-c8f6-4f37-9f49-8942cf2fe2c5

An apparatus that includes a pumping plate having a skirt, where the skirt contains a number of holes and a wafer access slot, and where the number of holes are sized and positioned to provide uniform heating of a susceptor. The molded gas adsorbent is disposed in the housing so that shifting is prevented without adhering the gas adsorbent to the housing, for example, by completely filling the housing. A burning step for reduction in film thickness is not required after the solution application. Whenever the control channel is transmitted as part of the frame, a sum of the first, second, third, fourth and fifth number of bits equals the fixed bit length, but whenever the control channel is not transmitted as part of the frame, a sum of the first, second, third and fourth number of bits equals the fixed bit length. The second transceiver includes a transmitter that transmits a selected waveform subsequent to the coherent combining.