A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. 02 and a second polymer, the first polymer being a continuous phase, and the second polymer being a disperse phase whose index of refraction differs from said continuous phase by greater than about 0. A small read current representing the digital data stored at a memory cell is obtained from the memory array via one of the two complementary data lines. The microfluidic device may include one or a plurality of porous membranes. The two housing parts are connected together so as to be rotatable in opposite directions about the longitudinal housing axis. The second position corresponds to the first position.