1460295237-c76c68eb-1295-4df5-b815-18e1334774d5

A supporting device for a plurality of adapter chucks for the precision grinding or polishing of optical components comprises a spindle shaft having a central bore for supplying one of a gas and a vacuum, at least one arm adjustably supported by a head of the spindle shaft and having a seating for an adapter chuck, and a flexible vacuumgas line provided between the seating and the spindle shaft. Panels are placed horizontally in an opposing and parallel spaced-apart relationship. During use, the cooling device can be movable towards and away from a wafer placed in the chamber for selectively cooling the wafer at desired times. The control groove is defined in one of the piston and control member, and the pin is provided on the other of the piston and control member. Methods of making the reactive tricalcium phosphate nanoparticles, the cement powder, the cement paste, and cured cement are also provided, as are methods and articles for using the cement.