According to one embodiment of the invention, a silicon-on-insulator device includes an insulative layer formed overlying a substrate and a source and drain region formed overlying the insulative layer. Each trunnion includes two opposing spherical contact surfaces disposed in the directions subject to load, and two opposing side surfaces disposed between the two opposing spherical contact surfaces and in the directions perpendicular to the spherical surfaces and not subjecting to the load. The light sources are modulated and the detector outputs are demodulated such that the signals associated with the at least four optical measurement beams are individually detected. The method is especially useful in conjunction with a meta-model based technique for modeling the enterprise data. The filters utilize multi track spiral inductors.