According to one embodiment, a method of manufacturing a semiconductor device which includes a MISFET, includes: forming a gate insulating film on a semiconductor substrate; forming a gate electrode on the gate insulating film; implanting nitrogen equal to or more than 5. The apparatus has a support surface surrounding in part the central bore and slots. The thermometer module further includes a microcontroller operative to interpret electrical signals derived from an output of the noncontact thermal energy detector so as to determine temperature at the target location. The method includes determining a sampled scalar error associated with the signal at a second phase. When the mobile device is in text-entry mode, the dual-mode keys may be used to input the associated text-entry characters, with the toggle keys each being operable to input a first text-entry character when a first portion of the toggle key is pressed and to input a second text-entry character when a second portion of the toggle key is pressed.