A method of forming refractory metal nitride layers, such as a tantalum nitride barrier layer, on a substrate by using a vapor deposition process with a refractory metal precursor compound, a disilazane, and an optional silicon precursor compound. For example, the hollow fibre may be wrapped around around two or more supports and the distance between adjacent supports increased. The input torque limiter grounds additional torque from the input shaft when engaged. At least one embodiment of the suture anchor has portions formed of a relatively hard material which does not absorb body liquids and is pressed against body tissue by the material which absorbs body liquid to mechanically interlock the suture anchor and the body tissue. The present invention can be used to control corrosion without costly and easily damaged coatings or adhesives; and can be applied to metallic structures in the field prior to installation.