A nebulization apparatus with a packaging and fixing structure includes a piezoelectric driving device, an adhesive agent, a nebulization plate, a packaging layer and a fixing base. For example, a conformal depth of arsenic impurities andor carbon impurities may be implanted by plasma immersion ion implantation in junction recesses to reduce boron diffusion and current leakage from boron doped junction region material deposited in the junction recesses. Each pixel is aligned with an aperture.