The method for packaging together a plurality of record rolls of cover tape according to the present invention comprises wrapping a stack obtained by roughly coaxially stacking said record rolls in a heat-shrink film; and heat-shrinking said heat-shrink film, so that a pressure of at least 0. Connecting elements each have one end connected to a respective input attachment point and an opposite end connected to a respective output attachment point by a link joint. A flange surrounding an inlet opening is positioned spaced from the collection area. Each electron optical column is enhanced with an electron gun with redundant field emission sources, a voltage contrast plate to allow voltage contrast imaging of wafers, and an electron optical design for high efficiency secondary electron collection. One clamp has a motorized trolley that provides adjustment needed for handling chassis of widely varying wheelbase.