A vapor decontamination system for decontaminating a defined region. A controller provides access to two or more disparate networks in parallel, through direct or indirect network interfaces. Even if a dielectric substrate is assembled out of alignment with the waveguide due to an assembling error, edges of a ground metal layer on the dielectric substrate are exposed from the beveled inner corners at the open end of the waveguide. , first and second halves by means of a slit formed along the axis of the tip end member, and the first half having the predetermined rigidity is movable around a connection between itself and the tip body. A safety filter element downstream of the main filter element filters both the axial flow in the hollow interior and additional flow between the flow perimeter and the inner perimeter. The select transistor is spaced apart from the control transistor.