A thermoacoustic chip includes a substrate, a sound wave generator, a first electrode, and a second electrode, and an integrated circuit chip. The vertical MISFETs comprise rectangular pillar laminated bodies each formed by laminating a lower semiconductor layer, an intermediate semiconductor layer, and an upper semiconductor layer, and gate electrodes formed on corresponding side walls of the laminated bodies with gate insulating films interposed therebetween. In addition to use in dental care, the system finds utility in hair coloring, spot laundry cleaning, skin and nail care, and polishing, as well as numerous others. The first semiconductor layer is disposed on the roughed surface.