A system and methods with which changes in microstructure properties such as grain size, grain elongation, texture, and porosity of materials can be determined and monitored over time to assess conditions such as stress and defects. These control modules include a prior module, a present module, and a next module. , in the manufacture of microelectronic devices, as well as processes of making and using such precursors, and precursor supply systems containing such precursor compositions in packaged form. With the present invention, the dielectric constant of the high-k dielectric layer can be optimized while improving interface characteristics. The parallel paths of the armature winding are perfectly balanced. The steering lock unit includes a locking bar engageable with the steering shaft, a lock stopper holding the locking bar, a camshaft to convert a rotary motion of the key cylinder unit into a linear motion of the lock stopper, and a lock holder configured such that the lock stopper, the cam shaft and the locking bar are installed therein by being inserted thereinto in a same direction.