A CMP station can be closed loop controlled by using data obtained by an inline metrology station from a first polished wafer to affect the processing of subsequent polished wafers. The motor control board is fixed to the motor via the coupling unit such that the motor control board is disposed below the motor and above the trigger switch. The medical monitoring device may also include a communications unit for communicating stored data, such as usage and physiological parameter data, over a communication network to a remote computer. The deck has a central portion and end portions.