In a maltilayer exhaust gas component sensor for measuring NOX and HC, the reliability and the productivity are improved without degrading the detecting sensitivity. The voltage provided at the terminal being substantially constant when the external voltage is greater than the pinch-off voltage. The measured value is formed by a linear linking of the sum of the smoke signals to the difference between the smoke signals BW, FW or by establishing the value for the difference between the smoke signals. Applications of the process include the formation of integrated circuit structures and MEMS structures. The method includes recognizing a voice inputted from a microphone when a call is connected, identifying a numeral corresponding to the recognized voice, and transmitting the identified numeral to a phone number to which the call is connected. A system for carrying out the cleaning comprises a suction pump, a wastewater collecting tank, a suction hose for connection between the waste and wash water collecting tank and a heat transfer medium inlet or outlet of the pipe and an ice-feeding hose provided at one end with a hopper and connectable at the other end to the heat transfer medium outlet or inlet pipe.