The invention relates to a method and system for cleaning semiconductor elements accommodated in a tank which uses ozonized, deionized ultrapure water. According to the invention, several electroconductive coupling pins are used, each of these extending preferably vertically into both the waveguide chamber and the applicator resonator chamber, in order to feed in the microwaves with as little loss as possible and to enable the field distribution in the resonator chamber to be modified. The RAT allocates an entry of the first queue and populates the allocated entry with an instruction pointer of a load instruction, when it determines that the load instruction must be replayed.