A process for the preparation of nano structured silicon thin film using radio frequency plasma discharge useful for light emitting devices such as light emitting diode, laser etc. The location of a vehicle is determined using radio frequency signals, such as pseudolite transmissions of ranging signals. A lower dielectric layer is then formed in the trench such that the lower dielectric layer at least partially fills the trench. A first platen having a first attachment hub can be selectively coupled with the retaining member in an installed position. 56 is applied to the lower electrode 106 to generate plasma. In order to receive the corresponding winding wire end, in the region of the contact surface of the wire support, a second clamping gap with a minimal second width is arranged behind the first clamping gap, the width being smaller than the first width of the first clamping gap.