An IC that performs integer and fractional divisions is disclosed. The design space is encircled and heated by a jacket heating device. The vacuum pump is in fluid communication with the lumen defined by the needle for evacuating gas from the hermetically sealed package, and in fluid communication with the mass flow rate sensor for directing mass flow from the evacuated package into operable contact with the mass flow rate sensor so as to permit sensing of any continuing mass flow from the evacuated package. In another configuration, the evanescent wave probe is used in a micro-reactor array assay. An amount of variation of a front edge of the dummy lapping guide, which is defined by the same process step as a writer pole flare point, can be calculated by measuring the width of the dummy lapping guide based on its electrical resistance. In the high-pressure jet cleaning method or the two-fluid cleaning method, a cleaning liquid or a mixed fluid of the cleaning liquid and a gas is jetted from a cleaning fluid jetting nozzle toward a subject to be cleaned, and the subject is cleaned.