A measurement arrangement for a shaft mounted in a bearing. The grip portion has an arm portion, and the case portion has a hole and a wall portion for receiving the arm portion. The telescopic foot frame for the broiler oven to be rotatably mounted thereon is composed of a collapsible foot frame and a telescopic tube. The variation of the conductance gap is another parameter for processing regions of a substrate differently to evaluate the impact of the conductance variation on a deposition process.