A method to authenticate a server to a client is provided, including in-band and out-of-band techniques. After a capacitor 700 of the DRAM is formed, silicide layers 19a and 19b are formed over N+ type sourcedrain regions 41c and 41d of MOS field effect transistors 200c, 200d and 200e that are located in peripheral circuit region 2000 and logic circuit region 3000. The first connector is mounted on the first side of the riser card. Sequentially, a combined grid image is generated by combining the first grid image and the second grid image based on the relative positioning relationship, wherein the first and second grid images are obtained by irradiating a grid patterned light toward a measurement object formed on the board inspection apparatus.