The crystallization method by laser light irradiation forms a multiplicity of convexes in the surface of an obtained crystalline semiconductor film, deteriorating film quality. The formulations comprise at least one beneficial agent uniformly suspended in the vehicle. The processing module provides a virtual keyboard interface on a capacitive touch surface of the panel. The condenser has a variable electric capacitance. Each of the device isolation patterns includes a first air gap, and each of a top surface and a bottom surface of the first air gap has a wave-shape in a cross-sectional view taken along the second direction. The tool bar also provides a means for executing user selections and commands and for providing alerts to the user.