According to one embodiment, a method for patterning a set of features for a semiconductor device includes providing a mask including a substrate and at least one pair of first and second main features disposed on a substrate. Compounds that promote or inhibit the activity of the above protein, which are obtained by a screening method using the protein, can be used as, for example, prophylactictherapeutic agents for the above-described diseases. The process chamber is vacuum pumped through the plurality of orifices to expel the ionized contaminants from the process chamber. Upon the listening horizon expiring, the method turns off the speech recognition functionality. The compounds and compositions of the invention can induce the biosynthesis of various cytokines and are useful in the treatment of a variety of conditions including viral diseases and neoplastic diseases.