1460612324-b868f4dc-40d4-4ea8-a94b-6ec95fa107c7

The invention relates to a supply pump embodied as a side channel pump, whereby several sections forming the cross-section of a supply chamber each comprise radii. According to the phenol resin of the invention, epoxylation thereof, chemical modification thereof, reaction thereof with an epoxy resin, and the like are facilitated. A Group III nitride layer is provided on the opposing surface of the support.