Application form of and demand for an IC chip formed with a silicon wafer are expected to increase, and further reduction in cost is required. The counterbalance valve relief setting changes dynamically based on the load pressure at the load port of the counterbalance valve. Reading of data, accumulation and writing of data proceed in parallel in each cycle of accumulation. Other embodiments are also described. A treatment section 22 deletes the uncompleted job or puts the uncompleted job on standby according to a response from the requesting user, so as to eliminate the stagnation of the job. An excitation vector generator generates an excitation vector from the dispersed vectors generated by the dispersion vector generator.