An Apparatus for purifying a feed stream containing carbon dioxide in which the feed stream, after having been compressed and dried, is partly cooled and then used to reboil a stripping column. The conveyor belt cleaner and tensioner assembly includes a mounting base adapted to be mounted to the cross shaft and an arm member having a first end and a second end. A sense amplifier is connected to the data readout line. A change in the routing table may be identified by the utility meter, and an alert message associated with the identified change may be generated by the utility meter. This compressive clamping force may mechanically retain the cover to the substrate, and also compress the electrically-conductive member against at least one electrically-conductive surface disposed on the substrate, to establish electrical conductivity therebetween that is sufficient for EMI shielding performance. Over the third interlayer insulating film and inside the second contact hole, a second conductive film electrically connected to a first conductive film is formed.