Disclosed is a lithographic apparatus comprising a member susceptible to deformation and a deformation sensor for measuring a deformation of said member. Also provided herein are vectors and host cells comprising those nucleic acid sequences, chimeric polypeptide molecules comprising the polypeptides of the present invention fused to heterologous polypeptide sequences, antibodies which bind to the polypeptides of the present invention and to methods for producing the polypeptides of the present invention. An electric melting metal fuse is connected in series with each electrical load. The link rod has a first end engaging with the movable member at either a locking position or a releasing position of the movable member and a second end received in the indentation of the base. The polymeric resin may have multiple components where one component may control the dispersion of the nanoparticles.