To provide a process for producing an EUV mask blank, capable of reducing foreign matter attributable to a sputtering target, and a process for producing a substrate with a functional film for such a mask blank. These compositions are preferably made by reaction of a natural oil with a multi-functional hydroxyl compound derived from a natural source, such as sorbitol, in presence of an alkali metal salt or base such as potassium hydroxide as a catalyst which also acts to saponify the reaction mixture. Select and enable signals control the operation of the scan path sections. The adaptive TDD configuration information comprises an actual TDD configuration and a reference TDD configuration. The processor activates an audiblevisual indicator when the sensed COHb percentage exceeds the alarm threshold.