An improved image projection lighting device is disclosed. As a result, stable and uniform plasma is maintained in the vicinity of the surface of the substrate to be processed even in the case a low pressure plasma process such as etching is conducted. The short circuiting device contains a first contact element providing a face to make contact with the track rail and a contact arm that is coupled to the contact element via a jointed connection and has a contact face for making contact with the conductor rail. The slider is configured to cause a relative motion between the first and second portions along the intersecting face according to a temperature change. A surface of the top pole layer facing the recording medium can be formed recessed from a surface of the pole tip facing the recording medium.