A pneumatic assembly preferably includes a sealing member disposed between a compressed gas storage area and a compressed gas releasing area. A flow compensation means calculates a temperature of a fluid from a propagation time and makes compensation for the flow rate using the temperature calculated based on the propagation time in a state in which the temperature is not measured by the temperature measuring means. In addition, the locker arm is movably coupled to the locker frame fixed on the main body, and installed on the main body in a state where the locking unit is assembled in advance. This processing removes also a silicon nitride film on the back side of the wafer, and after a series of strain-imparting processes, a polysilicon member is exposed from the back side surface of the wafer. The lower mold core is received in the receiving cavity with a clearance formed therebetween.