Disclosed is a process for the preparation of alkylene glycols from the corresponding alkylene oxide, such as ethylene glycol from ethylene oxide, in the presence of water, a catalyst and, optionally, carbon dioxide. The STI of a CVD oxide material including an angular bird’s beak extension structure is formed in a field region, a gate oxide film is formed in a relatively thick thickness in a HV region by using a nitride film as a mask, and a gate oxide film having a relatively thin thickness is formed in a low voltage region. The moderated data is stored at the computing platform system.