Devices, systems, methods and kits are provided for use in determining the concentration of chemical and biochemical components in aqueous fluids. The package is moved to a clean area having pathogen-reducing treatment such as a cleansing plasma. A rewiring plane is arranged between the semiconductor chips. A system may optionally have a sample chamber portion having a chemical indicator element which may be removably connected. The electrically conductive material and sourcedrain regions together are incorporated into a pair of adjacent recessed access devices.